%0 Electronic Article %A Schiffmann, K I %I IOP Publishing %D 1993 %D 1993 %G Undetermined %@ 1361-6528 %@ 0957-4484 %~ Katalog der Universitätsbibliothek Leipzig %T Investigation of fabrication parameters for the electron-beam-induced deposition of contamination tips used in atomic force microscopy %V 4 %J Nanotechnology %V 4 %N 3 %P 163-169 %U http://dx.doi.org/10.1088/0957-4484/4/3/006 %Z https://katalog.ub.uni-leipzig.de/Record/ai-49-aHR0cDovL2R4LmRvaS5vcmcvMTAuMTA4OC8wOTU3LTQ0ODQvNC8zLzAwNg %U https://katalog.ub.uni-leipzig.de/Record/ai-49-aHR0cDovL2R4LmRvaS5vcmcvMTAuMTA4OC8wOTU3LTQ0ODQvNC8zLzAwNg