Passivation of black silicon boron emitters with atomic layer deposited aluminum oxide : Passivation of black silicon boron emitters with atomic layer deposited aluminum...

Bibliographic Details
Authors and Corporations: Repo, Päivikki, Benick, Jan, Gastrow, Guillaume von, Vähänissi, Ville, Heinz, Friedemann D., Schön, Jonas, Schubert, Martin C., Savin, Hele
Title: Passivation of black silicon boron emitters with atomic layer deposited aluminum oxide : Passivation of black silicon boron emitters with atomic layer deposited aluminum oxide Passivation of black silicon boron emitters with atomic layer deposited aluminum oxide
In: physica status solidi (RRL) - Rapid Research Letters, 7, 2013, 11, p. 950-954
published:
Wiley
Physical Description:950-954
ISSN/ISBN: 1862-6254
Type of Resource:E-Article
Source:Wiley (CrossRef)
Language: English