Investigations on oxygen diffusion in annealing processes of non-stoichiometric amorphous indium tin oxide thin films

Bibliographic Details
Authors and Corporations: Neubert, T., Neumann, F., Schiffmann, K., Willich, P., Hangleiter, A.
Title: Investigations on oxygen diffusion in annealing processes of non-stoichiometric amorphous indium tin oxide thin films
In: Thin Solid Films, 513, 2006, 1-2, p. 319-324
published:
Elsevier BV
Physical Description:319-324
ISSN/ISBN: 0040-6090
Type of Resource:E-Article
Source:Elsevier BV (CrossRef)
Language: English