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Characterization of Solid Tin Target for Gas Discharges Produced EUV Plasmas
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Personen und Körperschaften: | , , , , , |
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Titel: |
Characterization of Solid Tin Target for Gas Discharges Produced EUV Plasmas |
In: | Solid State Phenomena, 121-123, 2007, S. 885-888 |
veröffentlicht: |
Trans Tech Publications, Ltd.
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Umfang: | 885-888 |
ISSN: |
1662-9779 |
DOI: | 10.4028/www.scientific.net/ssp.121-123.885 |
Zusammenfassung: | <jats:p>In the development of our Z-pinch plasma EUV source, xenon (Xe) is used for the background gas discharges, and a solid tin (Sn) rod is used as target material due to its potential of high convention efficiency (CE) from input electric energy to EUV radiation [1, 2]. The Z-pinch plasma was driven by pulsed current with amplitude of 30 kA and pulse duration of 110 ns. Pinhole imaging, EUV spectrograph and in-band EUV energy monitor were used to characterize the EUV emission from the Z-pinch discharge. The experimental analyses have demonstrated the CE was as high as 3% [3].</jats:p> |
Format: | E-Article |
Quelle: | Trans Tech Publications, Ltd. (CrossRef) |
Sprache: | Unbestimmt |